begin{tikzpicture}[thick,scale=0.6,every node/.style={transform shape},node distance=1.5cm]
  onslide<3->{node[state] (3a) {3,a};}
  onslide<7->{node[state] (2b) [above right=of 3a] {2,b};}
  onslide<4->{node[state] (3c) [above=of 2b] {3,c};}
  onslide<6->{node[state] (1d) [below right=of 3a] {1,d};}
  onslide<5->{node[state] (3e) [below=of 1d] {3,e};}

  path[->]
  onslide<8->{(3a) edge [loop above] node {textcolor<8>{red}{0|a}} ()}
  onslide<9->{(3c) edge [bend left] node {textcolor<9>{red}{0|c}} (3a)}
  onslide<10->{(3e) edge [bend left] node {textcolor<10>{red}{0|e}} (3a)};
end{tikzpicture}