#include <bits/stdc++.h>

#define FO(i,a,b) for (int i = (a); i < (b); i++)
#define sz(v) int(v.size())

#define MOD 1000000007ll

using namespace std;

typedef long long ll;

int n;
ll c[1<<17];
ll pw[1<<17];

ll x[8];

ll f(vector<int> v) {
	int m = sz(v);
	FO(i,0,1<<m) x[i] = 0;
	FO(i,0,1<<m) {
		// count things that are exactly i
		int bmsk = 0;
		FO(k,0,m) if (i&(1<<k)) bmsk |= 1<<v[k];
		FO(j,0,1<<m) if ((i&j)==i) {
			int msk = 0;
			FO(k,0,m) if (j&(1<<k)) msk |= 1<<v[k];
			if (__builtin_popcount(msk^bmsk)%2) x[i] -= c[msk];
			else x[i] += c[msk];
		}
	}

	ll res = 0;
	FO(i,0,1<<(1<<m)) {
		int msk = 0;
		FO(j,0,1<<m) if (i&(1<<j)) msk |= j;
		if (msk == (1<<m)-1) {
			ll tmp = 1;
			FO(j,0,1<<m) if (i&(1<<j)) {
				tmp = tmp*(pw[x[j]]-1) % MOD;
			}
			res += tmp;
			res %= MOD;
		}
	}
	return res;
}

int main() {
	pw[0] = 1;
	FO(i,1,1<<17) pw[i] = pw[i-1]*2 % MOD;
	scanf("%d", &n);
	FO(i,0,n) {
		int a; scanf("%d", &a);
		c[a]++;
	}
	FO(i,0,17) FO(j,0,1<<17) {
		if (~j&(1<<i)) c[j] += c[j|(1<<i)];
	}
	ll res = 0;
	FO(i,0,17) FO(j,0,i) FO(k,0,j) res += f({i,j,k}) * pw[i+j+k] % MOD * 6 % MOD;
	FO(i,0,17) FO(j,0,17) if (i != j) res += f({i,j}) * pw[i+i+j] % MOD * 3 % MOD;
	FO(i,0,17) res += f({i}) * pw[i+i+i] % MOD;
	printf("%lld\n", res%MOD);
}