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- [ { text: 'B1',
- nodes:
- [ { text: 'FEOL',
- nodes:
- [ { text: 'SPUTTER',
- nodes: [ { text: '0015', location: 'B1-FEOL-SPUTTER-0015' } ] },
- { text: 'COATING' },
- { text: 'EXPOSING' },
- { text: 'DEVELOP' },
- { text: 'PLATING' },
- { text: 'BOND' } ] },
- { text: 'BEOL',
- nodes:
- [ { text: 'GRINDING' },
- { text: 'BALLDROP' },
- { text: 'PROBING' },
- { text: 'BACKCOATING' },
- { text: 'MARKING' },
- { text: 'SORTING' },
- { text: 'TUG' } ] } ] },
- { text: 'B2',
- nodes:
- [ { text: 'FEOL',
- nodes:
- [ { text: 'SPUTTER' },
- { text: 'COATING' },
- { text: 'EXPOSING' },
- { text: 'DEVELOP' },
- { text: 'PLATING' },
- { text: 'BOND' } ] },
- { text: 'BEOL',
- nodes:
- [ { text: 'GRINDING' },
- { text: 'BALLDROP' },
- { text: 'PROBING' },
- { text: 'BACKCOATING' },
- { text: 'MARKING' },
- { text: 'SORTING' },
- { text: 'TUG' } ] } ] } ]
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