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By: ServiceManuals on Sep 7th, 2012  |  syntax: None  |  size: 0.82 KB  |  hits: 9  |  expires: Never
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  1. Micromachined Thin-film Sensors For Soi-cmos Co-integration                                                          
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  6. I. Introduction: Context and motivations.1.Why Silicon-on-Insulator technology? 2.Why a thin-film membrane? 3.Why co-integration and CMOS compatibility? 4.Contents of the work. II. Techniques and materials. 1.Silicon bulk micromachining with TMAH. 2.Thin dielectric films stress extraction. III. Microsensors. 1.Low power microhotplate as basic cell. 2.Microheater based flow sensor. 3.Gas Sensors on microhotplate. 4.SOI-CMOS compatibility validation. IV. Conclusions and outlook. Appendixes. A.(100) Silicon crystallography. B.About Interferometry. C.About Reflectometry. Bibliography. Publications...
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